1. X-ray source system
· Max. output : 2.2 kW x-ray tube with Cu target
· Long fine focus(line and point)
2. Incident X-ray beam optic
· Micro focus Point optics for Parallel beam
- Point beam Focus with double crystal(Spot diameter 1mm, beam divergence 0.25°)
- UBC collimator(0.1, 0.2, 0.3, 0.5, 1 mm)
· X-ray Mirror(Parallel)
- Equatorial divergence(0.028°)
- Geometry : line, parallel
· 2 bounce Monochromator
- Ge 022 Asymmetric
- FWHM the Si(111) Reflection : ≤ 0.0085°
· 4 bounce Monochromator
- Ge 044
- FWHM the Si(111) Reflection : ≤ 0.0016°
3. Sample stage system
· Vertical goniometer(600 mm ~ 900 mm)
· Eulerian Cradle stage (5 axis cradle)
· 2θ-Range : -110 ~ +168˚(Laser and CCD Video Microscope 부착시 다
를 수 있음)
· 5" vacuum chuck for sample mounting
· Computer controlled eulerian cradle
· High temperature chamber device( RT to +1100 °C)
4. Laser and CCD Video Microscope(Accuracy : 20 ㎛)
5. Secondary beam optic
· Parallel plate collimator(equatorial acceptance 0.2°), Single bounce crystal, Motorized receving slit, Motorized detector slit
6. Detectors
· Scintillation(Max. count rate : 2x106 cps)
· 1-D High speed semiconducting detector(Active area : 230 mm2)
· Large Area 2D detector
- Active area: 140 mm*140 mm
- Measurement circle distance : 50 mm~300 mm
- Cu-Ka, Co-Ka, Cr-Ka radiation
- 2048 * 2048 Pixel, Spatial resolution (pitch): 68 ㎛
5. Application Software
· PDF2 2018 year
· Phase analysis S/W, 2-D S/W 등